Direct patterning of micro-optical structures by combined nanoimprinting and lithography

Jarkko Tuominen; Jussi Hiltunen; Antoine Wojdyla; Mikko Karppinen; Antti Suutala; Heli Jantunen; Renaud Bouffaron; Ludovic Escoubas

doi:10.1117/12.781151

15 May 2008 Direct patterning of micro-optical structures by combined nanoimprinting and lithography

Jarkko Tuominen, Jussi Hiltunen, Antoine Wojdyla, Mikko Karppinen, Antti Suutala, Heli Jantunen, Renaud Bouffaron, Ludovic Escoubas

Author Affiliations +

Proceedings Volume 6992, Micro-Optics 2008; 69920B (2008) https://doi.org/10.1117/12.781151
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

The driving force behind combining the nanoimprinting and photolithography is to effectively utilize the advantages of both patterning techniques simultaneously. Conventional shadow-mask UV-lithography can be used to pattern micron-scale structures uniformly over large areas, whereas nanoimprinting enables patterning of nanoscale features, which can also be tilted or round-shaped. We present the work on direct patterning of micro-optical structures by combined nanoimprinting and lithography using modified mask aligner, hybrid mask mold and directly patternable, UV-curable materials. Patterning of structures is carried out in wafer-level fashion. Hybrid mask mold fabrication can be realized for example by modifying conventional shadow-mask using focused ion beam (FIB) milling, or by patterning a mold area on shadow-mask surface by nanoimprinting. One of the advantages of proposed fabrication method is that there is no need for reactive ion etching (RIE) process steps. We present also near-field holography (NFH) as a method of grating mold fabrication. Fabricated micro-optical structures include directly patterned waveguides with light coupling gratings, and also pyramid-shaped gratings which show antireflection properties in the mid-infrared spectral region.

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Jarkko Tuominen, Jussi Hiltunen, Antoine Wojdyla, Mikko Karppinen, Antti Suutala, Heli Jantunen, Renaud Bouffaron, and Ludovic Escoubas "Direct patterning of micro-optical structures by combined nanoimprinting and lithography", Proc. SPIE 6992, Micro-Optics 2008, 69920B (15 May 2008); https://doi.org/10.1117/12.781151

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