A multipoint diffraction strain sensor using a micro-lens array: from theory to application

Jun Wang; Anand Asundi

doi:10.1117/12.782614

25 April 2008 A multipoint diffraction strain sensor using a micro-lens array: from theory to application

Jun Wang, Anand Asundi

Proceedings Volume 6995, Optical Micro- and Nanometrology in Microsystems Technology II; 69950N (2008) https://doi.org/10.1117/12.782614
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

The single point Optical Diffraction Strain Sensor has been extended to a patent-pending Multipoint Diffraction Strain Sensor (MDSS) using a microlens array. The system was further extended for strain measurement with variable sensitivity and measurement range. In this paper, the MDSS is shown to measure both tilt and non-uniform strain with a sensitivity of 0.41 mε/pixel and 4.7 mrad/pixel respectively. As validation the strain measured by the MDSS is compared with that by a micro-moiré interferometer with a Gabor filtering method for fringe pattern analysis, while the tilt is compared with derivatives of the surface profile measured by a confocal microscope.

Citation Download Citation

Jun Wang and Anand Asundi "A multipoint diffraction strain sensor using a micro-lens array: from theory to application", Proc. SPIE 6995, Optical Micro- and Nanometrology in Microsystems Technology II, 69950N (25 April 2008); https://doi.org/10.1117/12.782614

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