Electromechanical energy conversion in the nanometer gaps

E. G. Kostsov

doi:10.1117/12.802501

29 April 2008 Electromechanical energy conversion in the nanometer gaps

E. G. Kostsov

Proceedings Volume 7025, Micro- and Nanoelectronics 2007; 70251G (2008) https://doi.org/10.1117/12.802501
Event: Micro- and Nanoelectronics 2007, 2007, Zvenigorod, Russian Federation

Abstract

The design the new principle of electromechanical energy conversion that allows one to carry the electrome-chanical energy conversion in the nanometer gap, and significantly (up to two orders of magnitude) increase MEMS specific energy output, operation speed and power. The energy conversion takes place in the nanometer gap (5 - 200 nm), when the electric energy accumulated during reversible electrostatic pressing of the free metallic film (moving electrode) to the surface of the thin crystalline dielectric (ferroelectric film, FF) with high dielectric permeability ε (more than 3000-5000) is transformed into mechanical energy . The tension of the metallic film caused by electro-static forces in converted into the mechanical motion of the moving element of the device. With this approach, the specific energy output of 0.3 - 1 10^-6 J/mm² and driving force of 0.01-0.3 N can be achieved starting from the first microseconds of the voltage pulse. An experimental investigation of new electromechanical energy converter is per-formed.

Citation Download Citation

E. G. Kostsov "Electromechanical energy conversion in the nanometer gaps", Proc. SPIE 7025, Micro- and Nanoelectronics 2007, 70251G (29 April 2008); https://doi.org/10.1117/12.802501

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available