Application of two-fluid nozzles for advanced photomask cleaning process

Kenji Masui; Tetsuo Takemoto; Kyo Otsubo; Mari Sakai; Tomotaka Higaki; Hidehiro Watanabe; Tsutomu Kikuchi; Yoshiaki Kurokawa

doi:10.1117/12.793018

19 May 2008 Application of two-fluid nozzles for advanced photomask cleaning process

Kenji Masui, Tetsuo Takemoto, Kyo Otsubo, Mari Sakai, Tomotaka Higaki, Hidehiro Watanabe, Tsutomu Kikuchi, Yoshiaki Kurokawa

Author Affiliations +

Proceedings Volume 7028, Photomask and Next-Generation Lithography Mask Technology XV; 702809 (2008) https://doi.org/10.1117/12.793018
Event: Photomask and NGL Mask Technology XV, 2008, Yokohama, Japan

Abstract

Damage to minute features of 45nm-node device masks occurred during megasonic cleaning. Since we were obliged to weaken the mechanical effect of megasonics in order to prevent the collapse of minute features, we could not obtain acceptable cleaning results. In order to manage the minute features, there is a need to develop a new mechanical cleaning method that causes less damage, but does not compromise the ability to remove particles. Cleaning using a two-fluid nozzle is a promising candidate. We investigated the two-fluid nozzle and compared it with megasonic cleaning, and we confirmed that the two-fluid nozzle achieved acceptable cleaning results without damaging 45nm-node device masks. Furthermore, for 32nm-node device masks, we have improved the two-fluid nozzle in terms of the cleaning energy distribution.

Citation Download Citation

Kenji Masui, Tetsuo Takemoto, Kyo Otsubo, Mari Sakai, Tomotaka Higaki, Hidehiro Watanabe, Tsutomu Kikuchi, and Yoshiaki Kurokawa "Application of two-fluid nozzles for advanced photomask cleaning process", Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 702809 (19 May 2008); https://doi.org/10.1117/12.793018

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available