Measurement of optical near field of a nanoscale aperture

Rui Guo; Wenhao Huang; Edward C. Kinzel; Arvind Raman; Xianfan Xu

doi:10.1117/12.796765

9 September 2008 Measurement of optical near field of a nanoscale aperture

Rui Guo, Wenhao Huang, Edward C. Kinzel, Arvind Raman, Xianfan Xu

Proceedings Volume 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II; 704207 (2008) https://doi.org/10.1117/12.796765
Event: NanoScience + Engineering, 2008, San Diego, California, United States

Abstract

Nanoscale apertures, especially high transmission nanoantennas, have been shown to have great potential for nanolithography as well as near-field measurements. This paper describes a method for mapping the near-field distribution as a function of distance from the aperture surface. The measurements are performed using a home-built near-field optical microscopy (NSOM) with home-made aperture probes. The force distance curve is used to determine the tip-sample distance. The calibrated NSOM system is then used to correlate the collected near-field optical distribution data with the distance from the surface. The in-plane optical images are obtained at a constant height by turning off the vertical position feedback. The experiment results show that this is a potential method to obtain three dimensional optical measurements of nano structures.

Citation Download Citation

Rui Guo, Wenhao Huang, Edward C. Kinzel, Arvind Raman, and Xianfan Xu "Measurement of optical near field of a nanoscale aperture", Proc. SPIE 7042, Instrumentation, Metrology, and Standards for Nanomanufacturing II, 704207 (9 September 2008); https://doi.org/10.1117/12.796765

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