Probabilistic method for multiparameter tolerancing in illuminator design

Stan Smirnov; Eric Catey

doi:10.1117/12.795187

2 September 2008 Probabilistic method for multiparameter tolerancing in illuminator design

Stan Smirnov, Eric Catey

Proceedings Volume 7068, Optical System Alignment and Tolerancing II; 706802 (2008) https://doi.org/10.1117/12.795187
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

In precision optical instruments, it is often the case that aspects of the illumination system pupil--such as ellipticity, telecentricity, and partial coherence--relate directly to image resolution and placement accuracy. Standard design and analysis tools are often ill-suited to performing tolerance analyses on illuminators, since the figures-of-merit in terms of system performance do not reduce neatly to wavefront and distortion, as they often do for imaging optics. In order to address these deficiencies, we developed a multiparameter tolerancing method based on a probabilistic treatment of errors in an illumination system, and we will describe the work we have done in this paper.

Citation Download Citation

Stan Smirnov and Eric Catey "Probabilistic method for multiparameter tolerancing in illuminator design", Proc. SPIE 7068, Optical System Alignment and Tolerancing II, 706802 (2 September 2008); https://doi.org/10.1117/12.795187

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available