An atomic force microscope (AFM) system is used for large-area measurement with a spiral scanning strategy, which is
composed of an air slide, an air spindle and a probe unit. The motion error which is brought from the air slide and the air
spindle will increase with the increasing of the measurement area. Then the measurement accuracy will decrease. In
order to achieve a high speed and high accuracy measurement, the probe scans along X-direction with constant height
mode driven by the air slide, and at the same time, based on the change way of the motion error, it moves along Zdirection
conducted by piezoactuator. According to the above method of error compensation, the profile measurement
experiment of a micro-structured surface has been carried out. The experimental result shows that this method is
effective for eliminating motion error, and it can achieve high speed and precision measurement of micro-structured
surface.
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