Development of a powerful tool for nanostructuring and multiphoton imaging with nanojoule femtosecond laser pulses

D. Bruneel; M. Schwarz; E. Audouard; K. König; R. Le Harzic

doi:10.1117/12.808800

24 February 2009 Development of a powerful tool for nanostructuring and multiphoton imaging with nanojoule femtosecond laser pulses

D. Bruneel, M. Schwarz, E. Audouard, K. König, R. Le Harzic

Author Affiliations +

Proceedings Volume 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII; 720117 (2009) https://doi.org/10.1117/12.808800
Event: SPIE LASE: Lasers and Applications in Science and Engineering, 2009, San Jose, California, United States

Abstract

An integrated tool combining control and diagnostic for nanoprocessing of bio-compatible and biological materials and also allowing multiphoton large area laser scanning microscopy has been developed. The device is based on an customized inverted microscope integrating a motorized open x,y stage with a very high precision and repeatability, a piezoelectric z axe. A strong development in hardware and software has been made for the control of the process. Imaging of large area by images reconstruction using a high resolution CCD camera for the machining and perforation of biological materials and non-biological materials on scales in the sub-micrometer range is possible. This tool can also be used as a laser scanning microscope of a large area using a PMT detector. This multi-function compact device is of prime interest and can be considered as a novel tool for nanoprocessing in material science, nanobiotechnology, nanomedicine. Further progress in telecommunications, optics, electronics, biomaterials, medicine, and transport strongly depends on the availability of reliable and rapid processing techniques. Laser-based micro-nano technology holds great promises and the evolution will be dictated by the development of inexpensive yet precise processing tools that can develop and structure materials with a high degree of controllability, accuracy, and reduced residual damage. Applications in biomedicine include, for example, optoporation, cells nanodrilling, nanocutting transfection of cells, deactivation of cell organelles or investigation of cell dynamics but also potentially useful in material science for the manufacture of waveguides, gratings, micro fluidic devices, nanocontainers, data storage, nanolithography, nanomarking,...

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D. Bruneel, M. Schwarz, E. Audouard, K. König, and R. Le Harzic "Development of a powerful tool for nanostructuring and multiphoton imaging with nanojoule femtosecond laser pulses", Proc. SPIE 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII, 720117 (24 February 2009); https://doi.org/10.1117/12.808800

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KEYWORDS

Image restoration

Cameras

Femtosecond phenomena

Nanoprocess

Laser applications

Nanostructuring

Software development

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