Microfabrication of refractive optics, waveguides, microfluidics, and high-aspect ratio structures realized by direct laser lithography

Pierre Blanchet; Cécile Aubert; Nicolas Brillouet; Paul Coudray

doi:10.1117/12.808153

24 February 2009 Microfabrication of refractive optics, waveguides, microfluidics, and high-aspect ratio structures realized by direct laser lithography

Pierre Blanchet, Cécile Aubert, Nicolas Brillouet, Paul Coudray

Author Affiliations +

Proceedings Volume 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II; 720513 (2009) https://doi.org/10.1117/12.808153
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

Microlens, micromirrors, quantum dots and microfluidics networks are some elements illustrating the need of miniaturisation for optics. This paper presents examples of high aspect ratio microstructures obtained with Dilase technology, a direct laser lithography technique in photosensitive layers. Vectorial writing associated with specific laser beam treatment allows imagine fast prototyping and production of a large range of MOE. Integrated optical circuits, such as optical MUX/DEMUX and splitters are strongly used in telecommunication and sensors industries. Microlens arrays, micromirrors present a large potential for imagery sector. "Lab on a chip" integrating microfluidic and optical waveguides systems are useful for medical diagnosis.

Citation Download Citation

Pierre Blanchet, Cécile Aubert, Nicolas Brillouet, and Paul Coudray "Microfabrication of refractive optics, waveguides, microfluidics, and high-aspect ratio structures realized by direct laser lithography", Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 720513 (24 February 2009); https://doi.org/10.1117/12.808153

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