A novel opto-electro-mechanical photon sensor

H. Mohseni; J. Kohoutek; O. G. Memis

doi:10.1117/12.814673

26 January 2009 A novel opto-electro-mechanical photon sensor

H. Mohseni, J. Kohoutek, O. G. Memis

Proceedings Volume 7222, Quantum Sensing and Nanophotonic Devices VI; 72220S (2009) https://doi.org/10.1117/12.814673
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

We present theoretical and experimental results for a novel photon detector based on a strong opto-electro-mechanical effect. In this new architecture, photo-generated carriers are compresses under a suspended nano-injector to produce significant electrostatic pressure. The pressure results in a reduced gap between the nano-injector and the semiconductor, which in turn increases the tunnel based electron injection dramatically. Our experimental results show very good sensitivity at 1.55 μm at room temperature. We also show that Casimir force has a considerable effect on the device performance, due to the small gap between nano-injector and semiconductor.

Citation Download Citation

H. Mohseni, J. Kohoutek, and O. G. Memis "A novel opto-electro-mechanical photon sensor", Proc. SPIE 7222, Quantum Sensing and Nanophotonic Devices VI, 72220S (26 January 2009); https://doi.org/10.1117/12.814673

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