A heterodyne interferometer for high-performance industrial metrology

Thilo Schuldt; Martin Gohlke; Dennis Weise; Ulrich Johann; Achim Peters; Claus Braxmaier

doi:10.1117/12.805051

17 November 2008 A heterodyne interferometer for high-performance industrial metrology

Thilo Schuldt, Martin Gohlke, Dennis Weise, Ulrich Johann, Achim Peters, Claus Braxmaier

Proceedings Volume 7266, Optomechatronic Technologies 2008; 72660M (2008) https://doi.org/10.1117/12.805051
Event: International Symposium on Optomechatronic Technologies, 2008, San Diego, California, United States

Abstract

We developed a compact, fiber-coupled heterodyne interferometer for translation and tilt metrology. Noise levels below 5 pm/√Hz in translation and below 10 nrad/√Hz in tilt measurement, both for frequencies above 10^-2 Hz, were demonstrated in lab experiments. While this setup was developed with respect to the LISA (Laser Interferometer Space Antenna) space mission current activities focus on its adaptation for dimensional characterization of ultra-stable materials and industrial metrology. The interferometer is used in high-accuracy dilatometry measuring the coefficient of thermal expansion (CTE) of dimensionally highly stable materials such as carbon-fiber reinforced plastic (CFRP) and Zerodur. The facility offers the possibility to measure the CTE with an accuracy better 10^-8/K. We also develop a very compact and quasi-monolithic sensor head utilizing ultra-low expansion glass material which is the basis for a future space-qualifiable interferometer setup and serves as a prototype for a sensor head used in industrial environment. For high resolution 3D profilometry and surface property measurements (i. e. roughness, evenness and roundness), a low-noise (≤1nm/√ Hz) actuator will be implemented which enables a scan of the measurement beam over the surface under investigation.

Citation Download Citation

Thilo Schuldt, Martin Gohlke, Dennis Weise, Ulrich Johann, Achim Peters, and Claus Braxmaier "A heterodyne interferometer for high-performance industrial metrology", Proc. SPIE 7266, Optomechatronic Technologies 2008, 72660M (17 November 2008); https://doi.org/10.1117/12.805051

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