Ni-PTFE electroformed micro parts by SU8-based UV-LIGA

Yuhua Guo; Yingnan Wang; Tom C. Kong; R. Du

doi:10.1117/12.810665

30 December 2008 Ni-PTFE electroformed micro parts by SU8-based UV-LIGA

Yuhua Guo, Yingnan Wang, Tom C. Kong, R. Du

Proceedings Volume 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV; 72690O (2008) https://doi.org/10.1117/12.810665
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2008, Melbourne, Australia

Abstract

The SU8-based UV-LIGA process, which combines lithography with electroforming, is a low cost fabrication method for producing MEMS and precision engineering parts. With lower surface energy and friction coefficient, these micro parts are required for applications such as micro gears and movable microstructures. This paper introduces a technique to fabricate Ni-PTFE micro parts using special treated galvanic bath. The experiment results show that the composite electroforming process is robust and the fabricated Ni-PTFE parts have good tribological properties.

Citation Download Citation

Yuhua Guo, Yingnan Wang, Tom C. Kong, and R. Du "Ni-PTFE electroformed micro parts by SU8-based UV-LIGA", Proc. SPIE 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV, 72690O (30 December 2008); https://doi.org/10.1117/12.810665

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