Ultra-precise micro-motion stage for optical scanning test

Wen Chen; Jianhuan Zhang; Nan Jiang

doi:10.1117/12.828633

20 May 2009 Ultra-precise micro-motion stage for optical scanning test

Wen Chen, Jianhuan Zhang, Nan Jiang

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 728315 (2009) https://doi.org/10.1117/12.828633
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

This study aims at the application of optical sensing technology in a 2D flexible hinge test stage. Optical fiber sensor which is manufactured taking advantage of the various unique properties of optical fiber, such as good electric insulation properties, resistance of electromagnetic disturbance, sparkless property and availability in flammable and explosive environment, has lots of good properties, such as high accuracy and wide dynamic range, repeatable, etc. and is applied in 2D flexible hinge stage driven by PZT. Several micro-bending structures are designed utilizing the characteristics of the flexible hinge stage. And through experiments, the optimal micro-bending tooth structure and the scope of displacement sensor trip under this optimal micro-bending tooth structure are derived. These experiments demonstrate that the application of optical fiber displacement sensor in 2D flexible hinge stage driven by PZT substantially broadens the dynamic testing range and improves the sensitivity of this apparatus. Driving accuracy and positioning stability are enhanced as well. ^[1,2]

Citation Download Citation

Wen Chen, Jianhuan Zhang, and Nan Jiang "Ultra-precise micro-motion stage for optical scanning test", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 728315 (20 May 2009); https://doi.org/10.1117/12.828633

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