Advances in 3D asphere testing and reconstruction

Christof Pruss; Eugenio Garbusi; Wolfgang Osten

doi:10.1117/12.822678

6 May 2009 Advances in 3D asphere testing and reconstruction

Christof Pruss, Eugenio Garbusi, Wolfgang Osten

Proceedings Volume 7329, Three-Dimensional Imaging, Visualization, and Display 2009; 732905 (2009) https://doi.org/10.1117/12.822678
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

One of the most challenging 3D metrology tasks in terms of required accuracy is the metrology of aspheric surfaces. Due to the required accuracies in the nanometer range, interferometry is one of the preferred methods. The reconstruction of the actual asphere shape from the measured phase data is presented for computer generated hologram approaches as well as for a new, flexible approach that was developed to avoid the use of null test configurations.

Citation Download Citation

Christof Pruss, Eugenio Garbusi, and Wolfgang Osten "Advances in 3D asphere testing and reconstruction", Proc. SPIE 7329, Three-Dimensional Imaging, Visualization, and Display 2009, 732905 (6 May 2009); https://doi.org/10.1117/12.822678

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