Effects of thermal oxidation interfacial layer on the photoelectrical properties of GaN-based Schottky diodes

Kai-hui Chu; Chao Li; Yong-gang Yuan; Xiang-yang Li

doi:10.1117/12.836284

24 August 2009 Effects of thermal oxidation interfacial layer on the photoelectrical properties of GaN-based Schottky diodes

Kai-hui Chu, Chao Li, Yong-gang Yuan, Xiang-yang Li

Author Affiliations +

Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 738123 (2009) https://doi.org/10.1117/12.836284
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

Thermal oxidation interfacial layer was inserted into the GaN-based material and Schottky contact interface during the device preparation to increase the barrier height. Different thickness of thermal oxidation interfacial layer was created by keeping the chips in the Rapid Thermal Processor (RTP) in atmosphere ambient for different periods of time before evaporating transparent Schottky contact. For GaN Schottky diodes, as the time kept in RTP increases, the diodes' zero-bias resistances decrease and the dark current increase considerably, and the peak photoresponse and UV-visible rejection factor of the responsivity of the diodes decrease abruptly. For Al_0.45Ga_0.55N Schottky diodes, as the time increase, the diodes' zero-bias resistances and dark current increase slightly, while the peak photoresponse and the UV/visible rejection factor of the responsivity of the diodes decrease a little.

Citation Download Citation

Kai-hui Chu, Chao Li, Yong-gang Yuan, and Xiang-yang Li "Effects of thermal oxidation interfacial layer on the photoelectrical properties of GaN-based Schottky diodes", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 738123 (24 August 2009); https://doi.org/10.1117/12.836284

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available