Structural properties analysis of CdTe thin films deposited by magnetron sputtering

Ling-de Kong; Jun Zhao; JIn-cheng Kong; Yan-li Shi; Rong-bin Ji

doi:10.1117/12.835383

5 August 2009 Structural properties analysis of CdTe thin films deposited by magnetron sputtering

Ling-de Kong, Jun Zhao, JIn-cheng Kong, Yan-li Shi, Rong-bin Ji

Proceedings Volume 7383, International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications; 738347 (2009) https://doi.org/10.1117/12.835383
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

Different phase structural CdTe films deposited onto 7101 glass substrates by magnetron sputtering were studied as a function of deposition methods at room temperature of 25±1. It was observed that when the deposition power intensity was kept at 0.884w/cm², and deposition methods were selected among normal method, discrete method and continuous substrate rotation method. Phase structural properties of these films were showed a mix structure of both zinc-blende cubic and wurtzite hexagonal phase, a single structure of cubic phase with the strong (111) preferential orientation, or amorphous CdTe thin films, respectively. Deposition methods played a critical role in determining phase structure of CdTe films.

Citation Download Citation

Ling-de Kong, Jun Zhao, JIn-cheng Kong, Yan-li Shi, and Rong-bin Ji "Structural properties analysis of CdTe thin films deposited by magnetron sputtering", Proc. SPIE 7383, International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications, 738347 (5 August 2009); https://doi.org/10.1117/12.835383

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