Studies on the fabrication method for the array of polycrystalline mercuric iodide detectors

Wei-feng Zheng; Wei-min Shi; Dong-mei Li; Juan Qin; Lin-jun Wang; Jian Huang; Jun-yang Yu; Yi-ben Xia

doi:10.1117/12.836611

4 August 2009 Studies on the fabrication method for the array of polycrystalline mercuric iodide detectors

Wei-feng Zheng, Wei-min Shi, Dong-mei Li, Juan Qin, Lin-jun Wang, Jian Huang, Jun-yang Yu, Yi-ben Xia

Proceedings Volume 7385, International Symposium on Photoelectronic Detection and Imaging 2009: Terahertz and High Energy Radiation Detection Technologies and Applications; 73851T (2009) https://doi.org/10.1117/12.836611
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

The Mercuric Iodide (HgI₂) semiconductor array detectors possess the characters of low noise, high detection efficiency, high energy resolution and working in room temperature. In this work, modified hot-wall physical vapor deposition (HW-PVD) method was used to grow high-quality polycrystalline HgI₂ thin-films on ITO glasses, and then 4×4 and 8×8 HgI₂ array detectors for X-ray radiation were fabricated. We used two fabrication processes for polycrystalline HgI2 array detectors. One was using mask made of stainless steel with good flexibility; while the other was to photo lithography the array on the ITO glass. The main purpose for this work was to compare the electrical properties of polycrystalline HgI₂ array detectors fabricated from different processes, and to find out the optimal process for HgI₂ detectors. Results indicated that the photo lithography method was a better way to fabricate polycrystalline mercuric iodide array detector than using mask method.

Citation Download Citation

Wei-feng Zheng, Wei-min Shi, Dong-mei Li, Juan Qin, Lin-jun Wang, Jian Huang, Jun-yang Yu, and Yi-ben Xia "Studies on the fabrication method for the array of polycrystalline mercuric iodide detectors", Proc. SPIE 7385, International Symposium on Photoelectronic Detection and Imaging 2009: Terahertz and High Energy Radiation Detection Technologies and Applications, 73851T (4 August 2009); https://doi.org/10.1117/12.836611

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