Imaging comparison of reflection and transmission grating systems

Lingyu Wan; Weiping Zhang; Qingyi Yang; Xiaoming Shen

doi:10.1117/12.825461

21 August 2009 Imaging comparison of reflection and transmission grating systems

Lingyu Wan, Weiping Zhang, Qingyi Yang, Xiaoming Shen

Proceedings Volume 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III; 74050V (2009) https://doi.org/10.1117/12.825461
Event: SPIE NanoScience + Engineering, 2009, San Diego, California, United States

Abstract

Two gratings consist of an imaging system in which a clear virtual image of an object is formed. The diffraction properties of gratings have important influence on the information of images. In this paper, the imaging characteristics of bi-reflection, bi-transmission gratings system and the transmission-reflection grating system are studied. The imaging process and the quality of images of three systems are compared and some characters are summarized. It is useful for the deep understanding of bi-grating imaging effect and its new applications.

Citation Download Citation

Lingyu Wan, Weiping Zhang, Qingyi Yang, and Xiaoming Shen "Imaging comparison of reflection and transmission grating systems", Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050V (21 August 2009); https://doi.org/10.1117/12.825461

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