Optical and structural properties of InN grown by HPCVD

M. Buegler; M. Alevli; R. Atalay; G. Durkaya; I. Senevirathna; M. Jamil; I. Ferguson; N. Dietz

doi:10.1117/12.828163

18 August 2009 Optical and structural properties of InN grown by HPCVD

M. Buegler, M. Alevli, R. Atalay, G. Durkaya, I. Senevirathna, M. Jamil, I. Ferguson, N. Dietz

Proceedings Volume 7422, Ninth International Conference on Solid State Lighting; 742218 (2009) https://doi.org/10.1117/12.828163
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

The optical and structural properties of InN layers grown by 'High Pressure Chemical Vapor Deposition' (HPCVD) using a pulsed precursor approach have been studied. The study focuses on the effect of ammonia precursor exposure time and magnitude on the InN layer quality. The samples have been analyzed by X-ray diffraction, Raman scattering, infra red reflectance spectroscopy and photoluminescence spectroscopy. Raman measurements and X-ray diffraction showed the grown layers to be single phase InN of high crystalline quality. The E2(high) Raman mode showed FWHM's as small as 9.2 cm^-1. The FWHM's of the InN(0002) X-ray Bragg reflex in the 2Θ-Ω- scans were around 350 arcsec, with rocking curve values as low as 1152 arcsec Photoluminescence features have been observed down to 0.7 eV, where the low energy cutoff might be due to the detector limitation. The analysis of the IR reflectance spectra shows that the free carrier concentrations are as low as as 3.3•10¹⁸ cm^-3 for InN layers grown on sapphire substrates.

Citation Download Citation

M. Buegler, M. Alevli, R. Atalay, G. Durkaya, I. Senevirathna, M. Jamil, I. Ferguson, and N. Dietz "Optical and structural properties of InN grown by HPCVD", Proc. SPIE 7422, Ninth International Conference on Solid State Lighting, 742218 (18 August 2009); https://doi.org/10.1117/12.828163

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available