High-resolution measurement of internal interface of optically transparent materials

Chun-Wei Chang; I-Jen Hsu

doi:10.1117/12.825199

21 August 2009 High-resolution measurement of internal interface of optically transparent materials

Chun-Wei Chang, I-Jen Hsu

Proceedings Volume 7426, Optical Manufacturing and Testing VIII; 742602 (2009) https://doi.org/10.1117/12.825199
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

The measurement of surface morphology of a material with high resolution is important in both the industrial and biomedical applications. Furthermore, a precise measurement of the morphology of the internal interface is usually needed for materials with multilayered structures. Although some optical techniques can provide subsurface imaging of materials, their resolutions are difficult to achieve nanometer scale. In our research, an optical system based on a composite interferometer which can image the internal interface of a material with nanometer resolution is proposed and demonstrated. The system consists of a Michelson interferometer and a Mach-Zehnder interferometer. The Michelson interferometer with a broadband light source is used for three-dimensional imaging of the sample. In the Mach-Zehnder interferometer, a prism and a retro-reflector are arranged for an optical delay line with adjustable length. The two interferometers share common light source and a rapid scanning optical delay system used for axial scanning. In the experiment, the adjustable optical delay line in the second interferometer is adjusted for the optical path lengths to match that relative to the interface under investigation. With a phase compensation mechanism, the interface can be imaged with an axial accuracy at nanometer scale.

Citation Download Citation

Chun-Wei Chang and I-Jen Hsu "High-resolution measurement of internal interface of optically transparent materials", Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 742602 (21 August 2009); https://doi.org/10.1117/12.825199

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available