Paper
21 August 2009 Edge tool influence function library using the parametric edge model for computer controlled optical surfacing
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Abstract
Computer controlled optical surfacing (CCOS) requires accurate knowledge of the tool influence function (TIF) for the polishing tool. The linear Preston's model for material removal has been used to determine the TIF for most cases. As the tool runs over the edge of the workpiece, however, nonlinear removal behavior needs to be considered to model the edge TIF. We reported a new parametric edge TIF model in a previous paper.** This model fits 5 parameters to measured data to accurately predict the edge TIF. We present material from the previous paper, and provide a library of the parametric edge TIFs for various tool shape and motion cases. The edge TIF library is a useful reference to design an edge figuring process using a CCOS technique.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dae Wook Kim, Won Hyun Park, Sug-Whan Kim, and James H. Burge "Edge tool influence function library using the parametric edge model for computer controlled optical surfacing", Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 74260G (21 August 2009); https://doi.org/10.1117/12.828499
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Cited by 5 scholarly publications.
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KEYWORDS
Motion models

Data modeling

Polishing

Motion measurement

Finite element methods

Performance modeling

Astronomical imaging

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