3D inspection microscope using holographic primary objective

Thomas D. Ditto; Jim Knapp; Shoshana Biro

doi:10.1117/12.826574

10 September 2009 3D inspection microscope using holographic primary objective

Thomas D. Ditto, Jim Knapp, Shoshana Biro

Proceedings Volume 7432, Optical Inspection and Metrology for Non-Optics Industries; 74320V (2009) https://doi.org/10.1117/12.826574
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

With refraction microscope optics it is generally understood that as magnification increases field-of-view will decrease. This constraint has posed scaling limitations for microscopy of large objects. We have shown in theory and proven in a reduction-to-practice that in the special case of grazing incidence diffraction, as magnification increases, field-of-view remains constant while efficiency goes down. This distinction has utility for many 3D optical inspection tasks. A holographic optical element (HOE) is used as the microscope's primary objective, and a laser stripe is used to interrogate target surfaces. The microscope's HOE can be embossed in polycarbonate and offered as a consumable part that can be replaced inexpensively if it becomes contaminated. Specimens can be placed on a moveable stage and advanced to collect a sequence of 3D profiles. Laser speckle is ameliorated as a natural consequence of the scanning mechanism. A prototype of the microscope has been demonstrated in a desktop embodiment. It is contemplated as a profiler for industrial inspection and quality control.

Citation Download Citation

Thomas D. Ditto, Jim Knapp, and Shoshana Biro "3D inspection microscope using holographic primary objective", Proc. SPIE 7432, Optical Inspection and Metrology for Non-Optics Industries, 74320V (10 September 2009); https://doi.org/10.1117/12.826574

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