Metrological AFMs and its application for versatile nano-dimensional metrology tasks

Gaoliang Dai; T. Dziomba; F. Pohlenz; H.-U. Danzebrink; L. Koenders

doi:10.1117/12.886192

31 December 2010 Metrological AFMs and its application for versatile nano-dimensional metrology tasks

Gaoliang Dai, T. Dziomba, F. Pohlenz, H.-U. Danzebrink, L. Koenders

Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 754446 (2010) https://doi.org/10.1117/12.886192
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China

Abstract

Traceable calibrations of various micro and nano measurement devices are crucial tasks for ensuring reliable measurements for micro and nanotechnology. Today metrological AFM are widely used for traceable calibrations of nano dimensional standards. In this paper, we introduced the developments of metrological force microscopes at PTB. Of the three metrological AFMs described here, one is capable of measuring in a volume of 25 mm x 25 mm x 5 mm. All instruments feature interferometers and the three-dimensional position measurements are thus directly traceable to the metre definition. Some calibration examples on, for instance, flatness standards, step height standards, one and two dimensional gratings are demonstrated.

Citation Download Citation

Gaoliang Dai, T. Dziomba, F. Pohlenz, H.-U. Danzebrink, and L. Koenders "Metrological AFMs and its application for versatile nano-dimensional metrology tasks", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 754446 (31 December 2010); https://doi.org/10.1117/12.886192

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