Paper
31 December 2010 Parameters of hot embossing in microfluidic chips
Wei Wang, Shaofeng Li, Li Tian, Jianmin Li, Tian Qin, Xiaowei Liu
Author Affiliations +
Proceedings Volume 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation; 75446B (2010) https://doi.org/10.1117/12.885666
Event: Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 2010, Hangzhou, China
Abstract
Twice hot-embossing, a new technology of hot-embossing proposed, can effectively reduce the error of hot forming caused by hot equipment. The depth / width ratio of micro-channel on the metal concave-mother-template is an influence parameter of twice hot-embossing; Optimization of the parameters, the PMMA convex-template has been produced in 120°C, ± 6MPa by twice hot-embossing.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wei Wang, Shaofeng Li, Li Tian, Jianmin Li, Tian Qin, and Xiaowei Liu "Parameters of hot embossing in microfluidic chips", Proc. SPIE 7544, Sixth International Symposium on Precision Engineering Measurements and Instrumentation, 75446B (31 December 2010); https://doi.org/10.1117/12.885666
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KEYWORDS
Polymethylmethacrylate

Microfluidics

Polymers

Ultrasonics

Metals

Mineralogy

Optical testing

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