High-quality percussion drilling of silicon with a CW fiber laser

Joe X. Z. Yu; Paul J. L. Webster; Ben Y. C. Leung; James M. Fraser

doi:10.1117/12.842616

17 February 2010 High-quality percussion drilling of silicon with a CW fiber laser

Joe X. Z. Yu, Paul J. L. Webster, Ben Y. C. Leung, James M. Fraser

Proceedings Volume 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV; 75840W (2010) https://doi.org/10.1117/12.842616
Event: SPIE LASE, 2010, San Francisco, California, United States

Abstract

It has been shown that 30 ns FWHM duration pulses from a MOPA fiber laser (wavelength: 1064 nm) cleanly micromachines silicon with little cracking or heat-affected zone¹. In this paper, we show that similar results can be achieved using a 1070 nm quasi-continuous wave laser pulsed with a 6.6 μs duration (average power: 2.8 W) in combination with coaxially delivered nitrogen assist gas. The holes are cut at a 5 kHz repetition rate with a resulting diameter on the order of 15 μm and an etch rate of up to 18 μm/pulse. Hole size is increased for longer pulses and the heat-affected zone broadens to greater than 25 μm with no assist gas. By combining low coherence microscopy with machining, we depth image the machining front and obtain in situ images during and after the drilling process showing rich cut dynamics in real time.

Citation Download Citation

Joe X. Z. Yu, Paul J. L. Webster, Ben Y. C. Leung, and James M. Fraser "High-quality percussion drilling of silicon with a CW fiber laser", Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 75840W (17 February 2010); https://doi.org/10.1117/12.842616

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available