Optimal design of SAW-based gyroscope to improve sensitivity

Haekwan Oh; Sangsik Yang; Keekeun Lee

doi:10.1117/12.841531

4 February 2010 Optimal design of SAW-based gyroscope to improve sensitivity

Haekwan Oh, Sangsik Yang, Keekeun Lee

Proceedings Volume 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX; 75920O (2010) https://doi.org/10.1117/12.841531
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

A surface acoustic wave (SAW)-based gyroscope was developed on a piezoelectric substrate. The developed gyroscope consists of two SAW oscillators, metallic dots, and absorber. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. Depending on the angular velocity, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg·s at an angular rate range of 0~1000 deg/s.

Citation Download Citation

Haekwan Oh, Sangsik Yang, and Keekeun Lee "Optimal design of SAW-based gyroscope to improve sensitivity", Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920O (4 February 2010); https://doi.org/10.1117/12.841531

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