Open loop control on large stroke MEMS deformable mirrors

Alioune Diouf; Thomas G. Bifano; Andrew P. Legendre; Yang Lu; Jason B. Stewart

doi:10.1117/12.842489

18 February 2010 Open loop control on large stroke MEMS deformable mirrors

Alioune Diouf, Thomas G. Bifano, Andrew P. Legendre, Yang Lu, Jason B. Stewart

Proceedings Volume 7595, MEMS Adaptive Optics IV; 75950D (2010) https://doi.org/10.1117/12.842489
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Improvements for open-loop control of MEMS deformable mirror for large-amplitude wavefront control are presented. The improvements presented here relate to measurement filtering, characterization methods, and controlling the true, non-differential shape of the mirror. These improvements have led to increased accuracy over a wider variety of deflection profiles including flattening the mirror and Zernike polynomials.

Citation Download Citation

Alioune Diouf, Thomas G. Bifano, Andrew P. Legendre, Yang Lu, and Jason B. Stewart "Open loop control on large stroke MEMS deformable mirrors", Proc. SPIE 7595, MEMS Adaptive Optics IV, 75950D (18 February 2010); https://doi.org/10.1117/12.842489

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