Cascaded silicon-nitride integrated spectrometers for wideband high-resolution spectral interrogation

Babak Momeni; Ehsan Shah Hosseini; Ali Adibi

doi:10.1117/12.848463

24 February 2010 Cascaded silicon-nitride integrated spectrometers for wideband high-resolution spectral interrogation

Babak Momeni, Ehsan Shah Hosseini, Ali Adibi

Author Affiliations +

Proceedings Volume 7609, Photonic and Phononic Crystal Materials and Devices X; 76090L (2010) https://doi.org/10.1117/12.848463
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

We report the demonstration of a cascaded configuration to realize wideband high-resolution spectrometers in silicon-nitride for the visible range. The cascaded configuration consists of an arrayed waveguide grating followed by a set of resonators and offers a flexibility to achieve the requirements of different sensing applications. We discuss some of the implementation issues of these structures. A preliminary demonstration shows the capability of such spectrometer devices to achieve ~0.1 nm wavelength resolution over 10 nm bandwidth in a compact device in a mm-scale device.

Citation Download Citation

Babak Momeni, Ehsan Shah Hosseini, and Ali Adibi "Cascaded silicon-nitride integrated spectrometers for wideband high-resolution spectral interrogation", Proc. SPIE 7609, Photonic and Phononic Crystal Materials and Devices X, 76090L (24 February 2010); https://doi.org/10.1117/12.848463

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