Experimental and numerical investigations on the density profile of CO2 laser-produced Sn plasma for an EUVL source

Y. Tao; Y. Ueno; S. Yuspeh; R. A. Burdt; N. Amin; N. M. Shaikh; M. S. Tillack; F. Najmabadi

doi:10.1117/12.848407

20 March 2010 Experimental and numerical investigations on the density profile of CO₂ laser-produced Sn plasma for an EUVL source

Y. Tao, Y. Ueno, S. Yuspeh, R. A. Burdt, N. Amin, N. M. Shaikh, M. S. Tillack, F. Najmabadi

Author Affiliations +

Proceedings Volume 7636, Extreme Ultraviolet (EUV) Lithography; 76360D (2010) https://doi.org/10.1117/12.848407
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Experimentally observed density profile of CO₂ laser-produced Sn plasma was compared with that predicted by one dimensional hydrodynamic radiation numerical code. Experimental data showed a much smaller corona and a much shorter shift distance of the critical density from the initial target surface as compared with those predicted by an isothermal model and the numerical simulation. The possible reason may come from thin localized laser deposition region, less energy transport into the corona and into the dense region beyond the critical density. This research suggests that more efforts to understand the fundamental dominating the interaction of CO₂ laser with high Z plasma are necessary to form a more solid foundation for the application of numerical method to the development of the EUVL source.

Citation Download Citation

Y. Tao, Y. Ueno, S. Yuspeh, R. A. Burdt, N. Amin, N. M. Shaikh, M. S. Tillack, and F. Najmabadi "Experimental and numerical investigations on the density profile of CO₂ laser-produced Sn plasma for an EUVL source", Proc. SPIE 7636, Extreme Ultraviolet (EUV) Lithography, 76360D (20 March 2010); https://doi.org/10.1117/12.848407

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available