IBF technology for nanomanufacturing technology

T. Franz; T. Hänsel

doi:10.1117/12.883031

6 October 2010 IBF technology for nanomanufacturing technology

T. Franz, T. Hänsel

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 765513 (2010) https://doi.org/10.1117/12.883031
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

Ultra precise figure error correction of optics whether down to the sub-nm RMS level or time-saving with nm-RMS accuracy by using three axes IBF-plants.

Citation Download Citation

T. Franz and T. Hänsel "IBF technology for nanomanufacturing technology", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 765513 (6 October 2010); https://doi.org/10.1117/12.883031

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