Thermal shock resistance ability of IAD-Si coated SSiC mirrors

Lingdi Xu; Xingke Fu; Wenchun Jiao; Ruimin Fu; Pengfei Sun; Jiapeng Wang

doi:10.1117/12.866985

6 October 2010 Thermal shock resistance ability of IAD-Si coated SSiC mirrors

Lingdi Xu, Xingke Fu, Wenchun Jiao, Ruimin Fu, Pengfei Sun, Jiapeng Wang

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 76553D (2010) https://doi.org/10.1117/12.866985
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

IAD-Si surface coating technique can availably improve surface quality of SSiC mirrors. But thermal stability of the film has great influence on optical and mechanical performances of the coated mirror. Under the action of space environment, primary damage forms of a coated mirror are destructed coating and changed surface figure. So, thermal shock stability of IAD-Si coated SSiC mirrors was tested and analyzed in this paper. Firstly, surface patterns of IAD-Si films on SSiC samples were observed with MF-A-1010B electronic microscope before and after thermal shock (77K~473K), results showed that there was no crack or abscission phenomena. Then, the surface figure stability of a 400mm, IAD-Si coated mirror was tested. After received 223K~473K thermal impact, surface figure changed less than λ/100 RMS (λ=632.8nm).

Citation Download Citation

Lingdi Xu, Xingke Fu, Wenchun Jiao, Ruimin Fu, Pengfei Sun, and Jiapeng Wang "Thermal shock resistance ability of IAD-Si coated SSiC mirrors", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76553D (6 October 2010); https://doi.org/10.1117/12.866985

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