Application of Zernike polynomials to test large aspheric surfaces in the fine grinding stage

Yangfang Deng; Jianguan Tang; Fan Wu

doi:10.1117/12.864176

11 October 2010 Application of Zernike polynomials to test large aspheric surfaces in the fine grinding stage

Yangfang Deng, Jianguan Tang, Fan Wu

Author Affiliations +

Proceedings Volume 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 76563O (2010) https://doi.org/10.1117/12.864176
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

A quantitative method in the fine grinding stage on the base of self-made test system is presented and is investigated by the experiments is presented in the paper. The contact mechanical equipment measures aspheric vector heights directly by a long rail and high precision grating probe. After calibrating system error and preprocessing data, the surface shape error and wave-front aberration coefficients of aspheric mirror are obtained by Zernike polynomials wave-front fitting the collected discrete three-dimensional data. Comparison with Hartmann sensor test method through polishing the aspheric mirror, the accuracy of wave-front error is in approximate agreement with each other, and the accuracy can meet the requirement of lager aperture aspheric mirror in the fine grinding stage. By experiment investigation in the process of manufacture and test, the system can guide machining in the fine grinding stage. The measurement system shows the advantages of low costs, operating convenience, as well as high-speed calculation.

Citation Download Citation

Yangfang Deng, Jianguan Tang, and Fan Wu "Application of Zernike polynomials to test large aspheric surfaces in the fine grinding stage", Proc. SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 76563O (11 October 2010); https://doi.org/10.1117/12.864176

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