Fabrication of regular patterned SERS arrays by electron beam lithography

U. Huebner; H. Schneidewind; D. Cialla; K. Weber; M. Zeisberger; R. Mattheis; R. Moeller; J. Popp

doi:10.1117/12.854184

28 April 2010 Fabrication of regular patterned SERS arrays by electron beam lithography

U. Huebner, H. Schneidewind, D. Cialla, K. Weber, M. Zeisberger, R. Mattheis, R. Moeller, J. Popp

Proceedings Volume 7715, Biophotonics: Photonic Solutions for Better Health Care II; 771536 (2010) https://doi.org/10.1117/12.854184
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

Due to its enormous signal intensity and high fingerprint sensitivity, surface enhanced Raman spectroscopy (SERS) is a powerful technique in chemical and biological applications. Our goal is the employment of the SERS technique for (bio)analytical devices. A main feature in order to achieve a versatile applicability is to ensure a reproducible and homogeneous signal across large measuring areas. Electron beam lithography is an adequate approach to assemble such reproducible arrays. Within this contribution, the fabrication process of regular patterned nanostructures based on electron beam lithography and argon ion beam etching is described. Using the exposure of crossed gratings of lines within a resist layer, gold nanorhomb and nanorectangle arrays are produced on a quartz wafer. The patterns are periodically arranged with pitches of 200 to 400 nm and exhibit sharp edges with corner radii of less than 10 nm. The pattern dimensions in combination with the small edge radii yield a high electromagnetic field enhancement caused by plasmonic excitation. The SERS arrays were characterized by means of SEM and were tested with respect to their SERS response, especially with regard to their reproducibility.

Citation Download Citation

U. Huebner, H. Schneidewind, D. Cialla, K. Weber, M. Zeisberger, R. Mattheis, R. Moeller, and J. Popp "Fabrication of regular patterned SERS arrays by electron beam lithography", Proc. SPIE 7715, Biophotonics: Photonic Solutions for Better Health Care II, 771536 (28 April 2010); https://doi.org/10.1117/12.854184

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available