Smart technology for blazed multilevel gratings in resonance domain

M. Oliva; T. Benkenstein; J. Dunkel; T. Harzendorf; A. Matthes; D. Michaelis; U. D. Zeitner

doi:10.1117/12.854587

13 May 2010 Smart technology for blazed multilevel gratings in resonance domain

M. Oliva, T. Benkenstein, J. Dunkel, T. Harzendorf, A. Matthes, D. Michaelis, U. D. Zeitner

Proceedings Volume 7716, Micro-Optics 2010; 77161L (2010) https://doi.org/10.1117/12.854587
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

The design and the fabrication of a multilevel blazed grating in resonance domain for first order high efficiency applications are presented. The design shows that a 3 phase level grating is sufficient to achieve efficiency of 90% in the minus first diffraction order. The standard technology for the fabrication of multilevel grating consists in multistep electron beam lithography and reactive ion beam etching of the grating profile into the fused silica substrate. Typical fabrication errors of this technology approach, e.g. misalignment, reduce the theoretical reachable efficiency of the grating. Two new technological approaches were investigated to avoid these typical fabrication errors and to improve the multi level fabrication process. The designed grating has been fabricated by three different technological solutions and the geometrical characterization as well as the diffraction performance are presented and discussed.

Citation Download Citation

M. Oliva, T. Benkenstein, J. Dunkel, T. Harzendorf, A. Matthes, D. Michaelis, and U. D. Zeitner "Smart technology for blazed multilevel gratings in resonance domain", Proc. SPIE 7716, Micro-Optics 2010, 77161L (13 May 2010); https://doi.org/10.1117/12.854587

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available