Step height measurement by using heterodyne central fringe identification technique

W. T. Wu; H. C. Hsieh; Y. L. Chen; W. Y. Chang; D. C. Su

doi:10.1117/12.860356

24 August 2010 Step height measurement by using heterodyne central fringe identification technique

W. T. Wu, H. C. Hsieh, Y. L. Chen, W. Y. Chang, D. C. Su

Proceedings Volume 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV; 77670J (2010) https://doi.org/10.1117/12.860356
Event: SPIE NanoScience + Engineering, 2010, San Diego, California, United States

Abstract

A simple method for measuring a step-height sample is presented with the heterodyne central fringe identification technique and a precision translation stage. This method can accurately point out the zero optical path difference position such that the optical path lengths of two arms of the interferometer are absolutely equivalent. Thus, the two surfaces of the step-height sample can be identified sequentially with the translation stage. The displacement of the translation stage is equal to the step-height of the test sample. The feasibility of the technique is demonstrated. The measurable range is not limited by the coherence length of the light source. The measurement accuracy depends on the uncertainties of the heterodyne central fringe identification method and the translation stage. In our setup, we have a 100 mm measurable range and a 4 nm uncertainty. The wavelength stability of the light source has a minor effect on the measurement.

Citation Download Citation

W. T. Wu, H. C. Hsieh, Y. L. Chen, W. Y. Chang, and D. C. Su "Step height measurement by using heterodyne central fringe identification technique", Proc. SPIE 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV, 77670J (24 August 2010); https://doi.org/10.1117/12.860356

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Heterodyning

Interferometers

Light sources

Geometrical optics

Beam splitters

Mirrors

Phase modulation

Show All Keywords

Keywords/Phrases

Search In:

Publication Years