DLC/Si multilayer mirrors for EUV radiation

Peter Gawlitza; Stefan Braun; Andreas Leson; Wouter Soer; Martin Jak; Vadim Banine

doi:10.1117/12.861165

29 September 2010 DLC/Si multilayer mirrors for EUV radiation

Peter Gawlitza, Stefan Braun, Andreas Leson, Wouter Soer, Martin Jak, Vadim Banine

Proceedings Volume 7802, Advances in X-Ray/EUV Optics and Components V; 78020A (2010) https://doi.org/10.1117/12.861165
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

In this paper, a new type of spectral filter mirrors for extreme ultraviolet radiation based on DLC/Si multilayer coatings is presented (DLC - diamond-like carbon). The coating is nearly transparent for infrared radiation (IR) of λ = 10.6 nm but highly reflective at λ = 13.5 nm (EUV). We deposited DLC/Si multilayers by ion beam sputter deposition with 40 and 60 periods exhibiting maximum EUV reflectances of about R_max = 43 % and R_max = 50 %, respectively. Combining IR antireflective and EUV reflective coatings, first prototype mirrors have been fabricated with an EUV reflectance of about 42.5 % and an IR reflectance of about 4.4 % at the same time. Investigations on the thermal behavior of the multilayer stack and the cleaning properties for tin contaminated mirror surfaces have been carried out. Excellent stabilities of EUV peak position and reflectance values have been found using annealing temperatures of up to 700 °C. Furthermore, several cycles of Sn etching under H₂ reactive conditions have been applied to the mirrors without significant changes of the filter performance.

Citation Download Citation

Peter Gawlitza, Stefan Braun, Andreas Leson, Wouter Soer, Martin Jak, and Vadim Banine "DLC/Si multilayer mirrors for EUV radiation", Proc. SPIE 7802, Advances in X-Ray/EUV Optics and Components V, 78020A (29 September 2010); https://doi.org/10.1117/12.861165

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available