High aspect ratio taper-free micro and nano-channel fabrication in glass with ultrafast nondiffracting Bessel beams

F. Courvoisier; M. K. Bhuyan; M. Jacquot; P. A. Lacourt; R. Salut; L. Furfaro; John M. Dudley

doi:10.1117/12.875409

21 February 2011 High aspect ratio taper-free micro and nano-channel fabrication in glass with ultrafast nondiffracting Bessel beams

F. Courvoisier, M. K. Bhuyan, M. Jacquot, P. A. Lacourt, R. Salut, L. Furfaro, John M. Dudley

Author Affiliations +

Proceedings Volume 7921, Laser-based Micro- and Nanopackaging and Assembly V; 79210K (2011) https://doi.org/10.1117/12.875409
Event: SPIE LASE, 2011, San Francisco, California, United States

Abstract

Ultrafast laser pulses are a powerful tool to process dielectrics. Here, we review our recent work concerning high aspect ratio micro and nanochannel processing in glass. We show how femtosecond Bessel beams overcome many of the difficulties associated with Gaussian beams. We report on single shot processing of nanochannels with aspect ratio up to 100. Underlying physical phenomena are discussed.

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F. Courvoisier, M. K. Bhuyan, M. Jacquot, P. A. Lacourt, R. Salut, L. Furfaro, and John M. Dudley "High aspect ratio taper-free micro and nano-channel fabrication in glass with ultrafast nondiffracting Bessel beams", Proc. SPIE 7921, Laser-based Micro- and Nanopackaging and Assembly V, 79210K (21 February 2011); https://doi.org/10.1117/12.875409

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