Fabrication of single-mode channel waveguides via microfluidics

Sarfaraz Baig; Qunhui Sun; Michael R. Wang

doi:10.1117/12.876331

14 February 2011 Fabrication of single-mode channel waveguides via microfluidics

Sarfaraz Baig, Qunhui Sun, Michael R. Wang

Proceedings Volume 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV; 79270O (2011) https://doi.org/10.1117/12.876331
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

We report on the fabrication of single-mode channel waveguide structures via the vacuum assisted microfluidic technique. The soft lithographic technique in conjunction with specially designed photomask patterns and UV curable epoxy resins can result in a high yield, cost-effective method for fabrication of channel waveguides. In particular, the use of microfluidic technique allows for the production of freestanding high quality single-mode channel waveguides on various substrates. The viscosity limitation of the microfluidic fabrication of small cross-sectional waveguide structures, especially single-mode channel waveguides at visible wavelengths, has been overcome through the introduction of sectional flow tapers.

Citation Download Citation

Sarfaraz Baig, Qunhui Sun, and Michael R. Wang "Fabrication of single-mode channel waveguides via microfluidics", Proc. SPIE 7927, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics IV, 79270O (14 February 2011); https://doi.org/10.1117/12.876331

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