Paper
3 March 2011 Fermi level effect on strain of Si-doped GaN
Jinqiao Xie, Seiji Mita, Ramón Collazo, Anthony Rice, James Tweedie, Zlatko Sitar
Author Affiliations +
Proceedings Volume 7939, Gallium Nitride Materials and Devices VI; 79390B (2011) https://doi.org/10.1117/12.878726
Event: SPIE OPTO, 2011, San Francisco, California, United States
Abstract
Using high resolution X-ray diffraction and Hall effect measurements, we found that the tensile strain caused by dislocation inclination in Si doped GaN became immeasurable when carbon co-doping was used to compensate the free carriers. This result suggested that the tensile strain is related to free carrier concentration instead of Si concentration. Such an effect could be explained by the Fermi level effect on the dislocation climb at the growth surface mediated by Ga vacancies, whose concentration is strongly influenced by the Fermi level position. At a high electron carrier concentration, the formation energy of Ga vacancies is low and Ga vacancy concentration is high. Therefore, the dislocation climb-rate is enhanced, which results in a higher tensile strain. This phenomenon is similar to the wellknown Fermi level effect on Ga vacancy governed diffusion in the GaAs system.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jinqiao Xie, Seiji Mita, Ramón Collazo, Anthony Rice, James Tweedie, and Zlatko Sitar "Fermi level effect on strain of Si-doped GaN", Proc. SPIE 7939, Gallium Nitride Materials and Devices VI, 79390B (3 March 2011); https://doi.org/10.1117/12.878726
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KEYWORDS
Silicon

Gallium nitride

Doping

Gallium

Silicon carbide

Carbon

Metalorganic chemical vapor deposition

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