Ultrahigh Speed Electron Beam Pulsing Systems For Electron Beam Testing

John T.L. Thong; Simon C.J. Garth; William c. Nixon; Alec N. Broers

doi:10.1117/12.940941

2 February 1988 Ultrahigh Speed Electron Beam Pulsing Systems For Electron Beam Testing

John T.L. Thong, Simon C.J. Garth, William c. Nixon, Alec N. Broers

Proceedings Volume 0795, Characterization of Very High Speed Semiconductor Devices and Integrated Circuits; (1988) https://doi.org/10.1117/12.940941
Event: Advances in Semiconductors and Semiconductor Structures, 1987, Bay Point, FL, United States

Abstract

Measurement of high speed waveforms within operating integrated circuits presents a major challenge to design engineers. Electron beam testing techniques are well suited to the task due to their essentially non-loading properties. A number of such systems are briefly reviewed and their properties and drawbacks outlined. In addition, a recently developed system is described which overcomes some of the difficulties encountered with previous implementations.

Citation Download Citation

John T.L. Thong, Simon C.J. Garth, William c. Nixon, and Alec N. Broers "Ultrahigh Speed Electron Beam Pulsing Systems For Electron Beam Testing", Proc. SPIE 0795, Characterization of Very High Speed Semiconductor Devices and Integrated Circuits, (2 February 1988); https://doi.org/10.1117/12.940941

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