Introduction of Zr in Mg/Co nanometric periodic multilayers

Karine Le Guen; Min-Hui Hu; Jean-Michel André; Philippe Jonnard; Sika Zhou; Haochuan Li; Jingtao Zhu; Zhanshan Wang; Nicola Mahne; Angelo Giglia; Stefano Nannarone; Christian Meny

doi:10.1117/12.888193

18 February 2011 Introduction of Zr in Mg/Co nanometric periodic multilayers

Karine Le Guen, Min-Hui Hu, Jean-Michel André, Philippe Jonnard, Sika Zhou, Haochuan Li, Jingtao Zhu, Zhanshan Wang, Nicola Mahne, Angelo Giglia, Stefano Nannarone, Christian Meny

Author Affiliations +

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 799525 (2011) https://doi.org/10.1117/12.888193
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

We study the introduction of Zr as a third material within a nanometric periodic Mg/Co structure designed to work as optical component in the EUV range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements respectively. For the Mg/Co/Zr structure, the reflectance value is reported to be 50% at 25.1 nm and 45° of grazing incidence. Nuclear Magnetic Resonance (NMR) measurements are performed to study the nearest neighbour local environment around the Co atoms.

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Karine Le Guen, Min-Hui Hu, Jean-Michel André, Philippe Jonnard, Sika Zhou, Haochuan Li, Jingtao Zhu, Zhanshan Wang, Nicola Mahne, Angelo Giglia, Stefano Nannarone, and Christian Meny "Introduction of Zr in Mg/Co nanometric periodic multilayers", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799525 (18 February 2011); https://doi.org/10.1117/12.888193

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