Paper
20 May 2011 Development of nanostructured protective "sight glasses" for IR gas sensors
René Bergmann, Zachary James Davis, Michael Stenbæk Schmidt, Sønnik Clausen, Anja Boisen, Jens Møller Jensen, Rainer Buchner, Thomine Stolberg-Rohr, Mogens Havsteen Jakobsen
Author Affiliations +
Abstract
In this work protective "sight glasses" for infrared gas sensors showing a sub-wavelength nanostructure with random patterns have been fabricated by reactive ion etching (RIE) in an easy and comparable cheap single step mask-less process. By an organic coating, the intrinsic water repellent property of the surface could be enhanced, shown by contact angle and roll-off angle measurements. The "self-cleaning" surface property and chemical robustness towards aggressive environments are demonstrated. FT-IR spectroscopy concerning the optical properties of these nanostructured silicon windows revealed a stable anti-reflective "moth-eye" effect in certain wavelength ranges owing to the nanostructures.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
René Bergmann, Zachary James Davis, Michael Stenbæk Schmidt, Sønnik Clausen, Anja Boisen, Jens Møller Jensen, Rainer Buchner, Thomine Stolberg-Rohr, and Mogens Havsteen Jakobsen "Development of nanostructured protective "sight glasses" for IR gas sensors", Proc. SPIE 8016, Window and Dome Technologies and Materials XII, 80160S (20 May 2011); https://doi.org/10.1117/12.883921
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KEYWORDS
Glasses

Digital signal processing

Nanostructuring

Silicon

Infrared radiation

Nanostructures

Transmittance

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