A comb-drive scanning-head array for fast scanning-probe microscope measurements

S. Gao; H. Wolff; K. Herrmann; U. Brand; K. Hiller; S. Hahn; A. Sorger; J. Mehner

doi:10.1117/12.886938

5 May 2011 A comb-drive scanning-head array for fast scanning-probe microscope measurements

S. Gao, H. Wolff, K. Herrmann, U. Brand, K. Hiller, S. Hahn, A. Sorger, J. Mehner

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 806626 (2011) https://doi.org/10.1117/12.886938
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

A novel MEMS based scanning head comprising an array of comb drive actuators is developed for parallel SPM (Scanning Probe Microscope) imaging to enhance the performance of the currently available nano-measuring machines and effectively reduce the measurement time for large specimen. The scanning-head consists of an row of seven scan heads, which are realized on one chip by MEMS technology. The actuation of the scan-head is realized by an electrostatic comb-drive, in which the displacement can be measured by detecting the capacitance change of the actuator. The main shaft of the scan-head protrudes out of the MEMS chip to sense the surface topography of a specimen under test. To further improve the lateral resolution of the micro-SPM head, an AFM tip can be mounted onto the end of the actuator's main shaft. Design, simulation and fabrication of the scan-head array will be presented. The displacement of the actuator was calibrated using a laser interferometer. The actuator has a good linearity. Mechanical performance such as stiffness and eigenfrequency were also investigated. Preliminary experiments proved the feasibility of the scanninghead array for large-scale topography measurements.

Citation Download Citation

S. Gao, H. Wolff, K. Herrmann, U. Brand, K. Hiller, S. Hahn, A. Sorger, and J. Mehner "A comb-drive scanning-head array for fast scanning-probe microscope measurements", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 806626 (5 May 2011); https://doi.org/10.1117/12.886938

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