Ab initio intensity distribution of diffusely scattered light from rough metallic surfaces

J. A. Böhm; A. Vernes; M. J. Vellekoop

doi:10.1117/12.889489

23 May 2011 Ab initio intensity distribution of diffusely scattered light from rough metallic surfaces

J. A. Böhm, A. Vernes, M. J. Vellekoop

Proceedings Volume 8083, Modeling Aspects in Optical Metrology III; 80830U (2011) https://doi.org/10.1117/12.889489
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Non-contacting characterisation of finished surface is commonly done by means of optical systems, e.g., 3D microscopy. In case of the confocal white light microscope the topography of the tribological surface is determined by measuring the intensity distribution of the reflected light. In this work the inter- and intra-layer contributions to the complex optical conductivity tensor are quantum mechanically (ab initio) calculated on the microscopic scale. Based on these complex optical layer-resolved conductivity tensors, the Maxwell equations are solved for a proper modeling of the visible light propagation trough and from a layered sample. Applied to semi-infinite bcc Fe/Fe(100), among others, the incidence dependence of the scattered light is also discussed for variously machined surfaces.

Citation Download Citation

J. A. Böhm, A. Vernes, and M. J. Vellekoop "Ab initio intensity distribution of diffusely scattered light from rough metallic surfaces", Proc. SPIE 8083, Modeling Aspects in Optical Metrology III, 80830U (23 May 2011); https://doi.org/10.1117/12.889489

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