An alternative approach to fabricate metal nanoring structures based on nanosphere lithography

Zuzanna A. Lewicka; William W. Yu; Vicki L. Colvin

doi:10.1117/12.891827

23 September 2011 An alternative approach to fabricate metal nanoring structures based on nanosphere lithography

Zuzanna A. Lewicka, William W. Yu, Vicki L. Colvin

Proceedings Volume 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII; 810213 (2011) https://doi.org/10.1117/12.891827
Event: SPIE NanoScience + Engineering, 2011, San Diego, California, United States

Abstract

In this work we present a cost-effective fabrication method for metal ring-shaped nanostructure arrays based on nanosphere lithography. Periodic arrays of nanorings and nanocrescents were fabricated using a simple method that includes self-assembled monolayer formation, plasma treatment and deposition of metal. Lower cost and higher throughput were achieved due to the replacement of ion beam milling with reactive ion etching usually used in other methods. The dimensions of ring-like structures could be controlled by the size of the polystyrene spheres, the amount of deposited metal and the argon plasma etching time. These nanostructures can be made of essentially any metal and used as elements in optoelectronic nanodevices.

Citation Download Citation

Zuzanna A. Lewicka, William W. Yu, and Vicki L. Colvin "An alternative approach to fabricate metal nanoring structures based on nanosphere lithography", Proc. SPIE 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII, 810213 (23 September 2011); https://doi.org/10.1117/12.891827

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