Characterization of a 20-nm hard x-ray focus by ptychographic coherent diffractive imaging

Joan Vila-Comamala; Ana Diaz; Manuel Guizar-Sicairos; Sergey Gorelick; Vitaliy A. Guzenko; Petri Karvinen; Cameron M. Kewish; Elina Färm; Mikko Ritala; Alexandre Mantion; Oliver Bunk; Andreas Menzel; Christian David

doi:10.1117/12.893235

28 September 2011 Characterization of a 20-nm hard x-ray focus by ptychographic coherent diffractive imaging

Joan Vila-Comamala, Ana Diaz, Manuel Guizar-Sicairos, Sergey Gorelick, Vitaliy A. Guzenko, Petri Karvinen, Cameron M. Kewish, Elina Färm, Mikko Ritala, Alexandre Mantion, Oliver Bunk, Andreas Menzel, Christian David

Author Affiliations +

Proceedings Volume 8139, Advances in X-Ray/EUV Optics and Components VI; 81390E (2011) https://doi.org/10.1117/12.893235
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Recent advances in the fabrication of diffractive X-ray optics have boosted hard X-ray microscopy into spatial resolutions of 30 nm and below. Here, we demonstrate the fabrication of zone-doubled Fresnel zone plates for multi-keV photon energies (4-12 keV) with outermost zone widths down to 20 nm. However, the characterization of such elements is not straightforward using conventional methods such as knife edge scans on well-characterized test objects. To overcome this limitation, we have used ptychographic coherent diffractive imaging to characterize a 20 nm-wide X-ray focus produced by a zone-doubled Fresnel zone plate at a photon energy of 6.2 keV. An ordinary scanning transmission X-ray microscope was modified to acquire the ptychographic data from a strongly scattering test object. The ptychographic algorithms allowed for the reconstruction of the image of the test object as well as for the reconstruction of the focused hard X-ray beam waist, with high spatial resolution and dynamic range. This method yields a full description of the focusing performance of the Fresnel zone plate and we demonstrate the usefulness ptychographic coherent diffractive imaging for metrology and alignment of nanofocusing diffractive X-ray lenses.

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Joan Vila-Comamala, Ana Diaz, Manuel Guizar-Sicairos, Sergey Gorelick, Vitaliy A. Guzenko, Petri Karvinen, Cameron M. Kewish, Elina Färm, Mikko Ritala, Alexandre Mantion, Oliver Bunk, Andreas Menzel, and Christian David "Characterization of a 20-nm hard x-ray focus by ptychographic coherent diffractive imaging", Proc. SPIE 8139, Advances in X-Ray/EUV Optics and Components VI, 81390E (28 September 2011); https://doi.org/10.1117/12.893235

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