Paper
23 March 1987 Interferometric Testing Technology Developments And Applications In Japan
Toyohiko Yatagai
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Abstract
Research efforts for interferometric techniques and their applications in Japan are reviewed with an emphasis on recent developments. We will describe briefly digital fringe analysis techniques and theoretical approaches to precision phase analysis, and then practical applications of novel interferometers, holography, moire topography and optical fiber interferometry.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Toyohiko Yatagai "Interferometric Testing Technology Developments And Applications In Japan", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); https://doi.org/10.1117/12.941756
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Cited by 1 scholarly publication.
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KEYWORDS
Fringe analysis

Interferometry

Interferometers

Sensors

Metrology

Semiconducting wafers

Holography

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