Aluminum based multilayers systems synthesized by ion beam sputtering for extreme UV

A. Ziani; F. Delmotte; C. Le Paven-Thivet; E. Meltchakov; F. Bridou; A. Jérome; M. Roulliay; K. Gasc

doi:10.1117/12.896433

4 October 2011 Aluminum based multilayers systems synthesized by ion beam sputtering for extreme UV

A. Ziani, F. Delmotte, C. Le Paven-Thivet, E. Meltchakov, F. Bridou, A. Jérome, M. Roulliay, K. Gasc

Proceedings Volume 8168, Advances in Optical Thin Films IV; 81681S (2011) https://doi.org/10.1117/12.896433
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

In this paper, we present the development of Al-based multilayer mirrors for the spectral range [17 nm - 34 nm]. The purpose of presented study is to optimize the deposition of Al-based multilayers by the ion beam sputtering (IBS) technique according to several parameters such as the ion beam current and the angle of inclination of targets, which allowed us to vary the energy of ad-atoms deposited onto a substrate. We expected to achieve good reflectivity values for both two- and three-material stacks: aluminum/molybdenum Al/Mo, aluminum/molybdenum/boron carbide Al/Mo/B4C and aluminum/molybdenum/silicon carbide Al/Mo/SiC. We have undertaken a series of structural and chemical analyses of these systems. We present their optical characteristics in the EUV range.

Citation Download Citation

A. Ziani, F. Delmotte, C. Le Paven-Thivet, E. Meltchakov, F. Bridou, A. Jérome, M. Roulliay, and K. Gasc "Aluminum based multilayers systems synthesized by ion beam sputtering for extreme UV", Proc. SPIE 8168, Advances in Optical Thin Films IV, 81681S (4 October 2011); https://doi.org/10.1117/12.896433

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available