Calibration of diffractive micromirror arrays for microscopy applications

Dirk Berndt; Jörg Heber; Steffen Sinning; Dirk Rudloff; Steffen Wolschke; Mark Eckert; Jan-Uwe Schmidt; Martin Bring; Michael Wagner; Hubert Lakner

doi:10.1117/12.899881

8 September 2011 Calibration of diffractive micromirror arrays for microscopy applications

Dirk Berndt, Jörg Heber, Steffen Sinning, Dirk Rudloff, Steffen Wolschke, Mark Eckert, Jan-Uwe Schmidt, Martin Bring, Michael Wagner, Hubert Lakner

Author Affiliations +

Proceedings Volume 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies; 81910O (2011) https://doi.org/10.1117/12.899881
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

We report on our investigation to precisely actuate diffractive micromirror arrays (MMA) with an accuracy of λ/100. The test samples consist of analog, torsional MEMS arrays with 65 536 (256x256) mirror elements. These light modulators were developed for structured illumination purposes to be applied as programmable mask for life science and semiconductor microscopy application. Main part of the work relies on the well known characterization of MEMS mirrors with profilometry to automatically measure and approximate the MMA actuation state with high resolution. Examples illustrate the potential of this strategy to control the tilt state of many thousand micromirrors within the accuracy range of the characterization tool. In a dynamic range between 0 and >250 nm the MMA deflection has been precisely adjusted for final MMA application in the deep-UV - VIS - NIR spectral range. The optical properties of calibrated MMAs are tested in a laser measurement setup. After MMA calibration an increased homogeneity and improved image contrast are demonstrated for various illumination patterns.

Citation Download Citation

Dirk Berndt, Jörg Heber, Steffen Sinning, Dirk Rudloff, Steffen Wolschke, Mark Eckert, Jan-Uwe Schmidt, Martin Bring, Michael Wagner, and Hubert Lakner "Calibration of diffractive micromirror arrays for microscopy applications", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 81910O (8 September 2011); https://doi.org/10.1117/12.899881

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