Novel direction selective filter elements based on high-contrast gratings

Stefan Steiner; Stefanie Kroker; Thomas Käsebier; Frank Fuchs; Ernst-Bernhard Kley; Andreas Tünnermann

doi:10.1117/12.908184

16 February 2012 Novel direction selective filter elements based on high-contrast gratings

Stefan Steiner, Stefanie Kroker, Thomas Käsebier, Frank Fuchs, Ernst-Bernhard Kley, Andreas Tünnermann

Proceedings Volume 8270, High Contrast Metastructures; 827007 (2012) https://doi.org/10.1117/12.908184
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

We introduce concepts for direction selective transmission filters based on dielectric high-contrast gratings. The devices act as angular bandpass filters at an incidence angle of 45° with a total transmission of 68% and a full width at half maximum of 20°. Since the filters are based on a material combination of silicon and silicon dioxide they provide an excellent compatibility to well established fabrication processes in semiconductor industry. The results of measurements on fabricated samples are presented and the performance of the components is compared to that of metallic gratings. It is found that the latter can basically provide similar filter properties, however the feasible transmission efficiency is significantly lower than for the dielectric gratings. The presented configurations are applicable in the field of sensors and detectors.

Citation Download Citation

Stefan Steiner, Stefanie Kroker, Thomas Käsebier, Frank Fuchs, Ernst-Bernhard Kley, and Andreas Tünnermann "Novel direction selective filter elements based on high-contrast gratings", Proc. SPIE 8270, High Contrast Metastructures, 827007 (16 February 2012); https://doi.org/10.1117/12.908184

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KEYWORDS

Diffraction gratings

Silicon

Optical filters

Silica

Dielectrics

Dielectric filters

Refractive index

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